Wafer Loader & Inspection System AL120-WM

With Mapping E142 compatible to Olympus AL120

Benefits

Seamless integrate with Olympus AL-120-12 and MX-series microscope systems 

Programmable motorised stage for different inspection mode and patterns

Graphical and GUI electronic wafer map or bin code map configuration

Automatic wafer ID reader

Auto-focus and automatic wafer alignment 

SEMI E142 compliant wafer mapping structure

SECS/GEMS E142 SECS II compliant communication