Sawn Wafer Inspection System SI-Series

with wafer mapping E142 compatible to Olympus microscope systems

Benefits

Seamless integrate with Olympus MX-series and BXFM microscope systems 

Programmable motorised stage to handle wafer ring size up to 16” or 440 mm

Auto-loader for wafer ring cassette (eliminate handling direct to wafer / product)

Graphical and GUI electronic wafer map or bin code map configuration

RFID for cassette ID registration and automatic wafer ID reader

SEMI E142 compliant wafer mapping structure

SECS/GEMS E142 SECS II compliant communication