Smatech International Co.,Ltd

The OLS5000 laser confocal microscope precisely measures shape and surface roughness at the submicron level. Data acquisition that's four times faster than our previous model delivers a significant boost to productivity.

4 Key values of the OLS5000

1. Precise imaging

Capture the shape of any surface.

2. Fast

Get reliable data four times faster than our previous model.

3. Easy to operate

Just place your sample and press the Start button.

4. Longer working distance for larger samples

Measure samples that are up to 210 mm tall.

High-resolution, precise imaging

With the capability to make accurate 3D measurements on a wide range of sample types, the system delivers reliable data for quality assurance and process control.

Excellent lateral resolution

Excellent Lateral Resolution

The 405 nm violet laser and dedicated high-NA objectives make it possible to capture fine patterns and defects that conventional optical microscopes, white-light interferometers, or red laser-based microscopes are unable to detect.

Red type (658 nm: 0.26 μm line & space) Violet type (405 nm: 0.12 μm line & space)

Main unit

Model		OLS5000-SAF	OLS5000-SMF	OLS5000-LAF	OLS5000-EAF	OLS5000-EMF
Total magnification		54x - 17,280x
Field of view		16um - 5,120um
Measurement principle	Optical system	Reflection-type confocal laser scanning laser microscope Reflection-type confocal laser scanning laser-DIC microscope Color Color-DIC
	Light receiving element	Laser: Photomultiplier (2ch) Color: CMOS color camera
Height measurement	Display resolution	0.5nm
	Dynamic range	16 bits
	Repeatability σn-11 2 *5	5X：0.45μm, 10X：0.1μm, 20X : 0.03μm, 50X : 0.012μm, 100X : 0.012μm
	Accuracy 1 3 *5	0.15+L/100μm (L:Measuring length[μm])
	Accuracy for stitched image 1 3 *5	10X：5.0+L/100 μm, 20X or higher : 1.0+L/100 μm (L: Stitching length [μm])
	Measurement noise (Sq noise) 1 4 *5	1nm
Width measurement	Display resolution	1nm
	Repeatability 3σn-1 1 2 *5	5X : 0.4 μm, 10X : 0.2 μm, 20x : 0.05 μm, 50X : 0.04 μm, 100X : 0.02 μm
	Accuracy 1 3 *5	Measurement value +/- 1.5%
	Accuracy for stitched image 1 3 *5	10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm (L: Stitching length [mm])
Maximum number of measuring points in a single measurement		4096 x 4096 pixel
Maximum number of measuring points		36 Mpixel
XY stage configuration	Length measurement module	•	NA	NA	•	NA
	Operating range	100 x 100mm Motorized	100 x 100mm Manual	300 x 300 mm Motorized	100 x 100mm Motorized	100 x 100mm Manual
Maximum sample height		100mm	30mm	37mm	210mm	140mm
Laser light source	Wavelength	405nm
	Maximum output	0.95 mW
	Laser class	Class 2 (IEC60825-1:2007, IEC60825-1:2014)
Color light source		White LED
Electrical power		240 W	240 W	278 W	240 W	240 W
Mass	Microscope body	Approx. 31 kg	Approx. 32 kg	Approx. 50 kg	Approx. 43 kg	Approx. 44 kg
	Control box	Approx. 12 kg

*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20˚C±1˚C, humidity: 50%±1%) specified in ISO554(1976), JIS Z-8703(1983).
*2 For 20x or higher, when measured with MPLAPON LEXT series objectives.
*3 When measured with dedicated LEXT objective.
*4 Typical value when measured with MPLAPON100XLEXT objective, and may differ from the guaranteed value.
*5 Guaranteed under Olympus Certificate System.

** The OS license of Window 10 has been certified for the microscope controller (PC) provided by olympus. Therefore, Microsoft's license terms are applied and you agree to the terms.Please refer to the following for Microsoft license terms.
https://www.microsoft.com/en-us/Useterms/Retail/Windows/10/UseTerms_Retail_Windows_10_japanese.htm

Objective specifications

Series	Model	Numerical Aperture(NA)	Working Distance(WD)(mm)
UIS2 objective lens	MPLFLN2.5x	0.08	10.7
UIS2 objective lens	MPLFLN5x	0.15	20
LEXT dedicated objective lens (10X)	MPLFLN10xLEXT	0.3	10.4
LEXT dedicated objective lens (High performance type)	MPLAPON20xLEXT	0.6	1
	MPLAPON50xLEXT	0.95	0.35
	MPLAPON100xLEXT	0.95	0.35
LEXT dedicated objective lens (Long working distance type)	LMPLFLN20xLEXT	0.45	6.5
	LMPLFLN50xLEXT	0.6	5
	LMPLFLN100xLEXT	0.8	3.4
Super long working distance lens	SLMPLN20x	0.25	25
	SLMPLN50x	0.35	18
	SLMPLN100x	0.6	7.6
Long working distance for LCD lens	LCPLFLN20xLCD	0.45	8.3-7.4
	LCPLFLN50xLCD	0.7	3.0-2.2
	LCPLFLN100xLCD	0.85	1.2-0.9

Application software

Standard software	OLS50-BSW	Data acquisition app
Standard software	OLS50-BSW	Analysis app (Simple analysis)
Motorized stage package application*1	OLS50-S-MSP
Advanced analysis application*2	OLS50-S-AA
Film thickness measurement application	OLS50-S-FT
Auto edge measurement application	OLS50-S-ED
Particle analysis application	OLS50-S-PA
Multi-data analysis application	OLS50-S-MA
Sphere/cylinder surface angle analysis application	OLS50-S-SA

*1 Including Auto-stitching data acquisition and Multi-area data acquisition functions.
*2 Including Profile analysis, Difference analysis, Step-height analysis, Surface analysis, Area/volume analysis, Line roughness analysis, Area roughness analysis and Histogram analysis.